Chen, J. A.J. A.ChenLee, Si-ChenSi-ChenLeeHo, T. I.T. I.Ho2009-02-042018-07-062009-02-042018-07-061985http://ntur.lib.ntu.edu.tw//handle/246246/120958The Etching Characteristics of (100) GaAs by K2S2O8-H2O Systemjournal article10.1149/1.2113714