Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition method

Chen, C.C.P.C.C.P.ChenGurhanli, A.A.GurhanliChiang, T.-Y.T.-Y.ChiangHong, J.-J.J.-J.HongMelvin, L.S.L.S.MelvinCHUNG-PING CHEN2020-06-112020-06-112008https://scholars.lib.ntu.edu.tw/handle/123456789/501073Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition methodjournal article10.1116/1.30133102-s2.0-57249103665https://www.scopus.com/inward/record.uri?eid=2-s2.0-57249103665&doi=10.1116%2f1.3013310&partnerID=40&md5=169c460990a43e8298054f10e0dbfdd4