A low voltage CMOS-based capacitive micromachined ultrasonic sensors development

Tien, Y.-S.Y.-S.TienKu, P.-C.P.-C.KuLin, F.-Y.F.-Y.LinLi, P.-C.P.-C.LiLu, L.-H.L.-H.LuKuo, P.-L.P.-L.KuoPAI-CHI LIWEI-CHENG TIANLIANG-HUNG LUPO-LING KUO2020-06-112020-06-112012https://scholars.lib.ntu.edu.tw/handle/123456789/500820[SDGs]SDG7A low voltage CMOS-based capacitive micromachined ultrasonic sensors developmentconference paper10.1109/ICSENS.2012.64111412-s2.0-84873943282https://www.scopus.com/inward/record.uri?eid=2-s2.0-84873943282&doi=10.1109%2fICSENS.2012.6411141&partnerID=40&md5=51ff22a50d2975ecf214e1f3c8dfd380