瞿大雄臺灣大學：電信工程學研究所葉家豐Ye, Jia-FongJia-FongYe2007-11-272018-07-052007-11-272018-07-052007http://ntur.lib.ntu.edu.tw//handle/246246/58599本論文主要敘述以阻抗分析儀量測微波基板之介質常數及正切損失。量測儀器使用Agilent E4991A阻抗分析儀，頻率範圍1 MHz~3 GHz，測試夾具則為Agilent 16453A，頻率範圍1 MHz~1 GHz，量測方法係基於平行板電容原理，由量測之阻抗值計算介質基板之介質常數。夾具校準則使用開路、短路及標準負載補償，以消除主要之殘餘阻抗，並建立RLC等效電路模型及ABCD矩陣模型，經由實驗求得近似修正方程式，用以消除邊界電容量造成之測誤差。論文最後，並從夾具補償討論測試夾具量測精確度，以及介質板厚度對量測介質常數值之影響。This thesis discusses the measurement of dielectric constant and loss tangent of microwave substrates. The measurement instrument use Agilent E4991A impedance analyzer with Agilent 16453A test fixture. The measurement method is based on the principle of parallel plate capacitor to calculate the dielectric constant and loss tangent from the measured impedance values. The test fixture is calibrated using open, short and standard load compensation based on the two developed methods, RLC equivalent circuit method and ABCD matrix method, to remove the residual impedance, which is a major cause of measurement errors. In addition, a correction function based on measurement results are used to correct effect of edge capacitance. Finally, this thesis discusses the measurement accuracy of the test fixture compensation and the effect of the dielectric plate thickness on the measurement dielectric constant value.摘要......................................................I 英文摘要.................................................II 第一章 導論...............................................1 1-1 簡介..........................................1 1-2介質常數.......................................2 1-3介質常數量測之簡介.............................3 1-3-1 反射係數法...............................3 1-3-2 共振腔法.................................5 1-4 研究動機與章節介紹............................6 第二章 量測與萃取方法.....................................8 2-1 阻抗分析儀....................................8 2-2 量測夾具......................................9 2-2-1 介質材料規範............................9 2-2-2 夾具結構...............................10 2-3 量測原理.....................................11 第三章 夾具補償模型與萃取方法............................14 3-1 補償方法.....................................14 3-1-1 開路補償...............................15 3-1-2 短路補償...............................15 3-1-3 標準負載補償...........................16 3-2 夾具補償之等效模型萃取.......................17 3-2-1 RLC等效電路模型.......................17 3-2-2 ABCD矩陣模型..........................25 3-3 量測精確度...................................28 3-3-1 介質常數實部精確度.....................28 3-3-2 正切損失精確度.........................31 第四章 量測結果........................................35 4-1 RLC等效電路模型計算結果......................35 4-2 RLC等效電路模型誤差函數......................39 4-3 RLC等效電路模型轉換結果......................48 4-3-1 FR4量測結果............................48 4-3-2 RO4003量測結果.........................55 4-3-3 RO5880及RO4003量測結果.................62 4-4 ABCD矩陣模型誤差函數.........................67 4-5 ABCD矩陣模型轉換結果.........................70 4-5-1 FR4量測結果...........................70 4-5-2 RO4003量測結果.........................77 4-5-3 RO5880及RO4003量測結果.................84 第五章 結論..............................................90 5-1 RLC補償模型與ABCD矩陣模型差異................90 5-2 夾具量測之頻率範圍...........................93 參考文獻................................................1001194505 bytesapplication/pdfen-US介質常數量測阻抗分析儀Dielectric Constantthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/58599/1/ntu-96-R94942073-1.pdf