Synthesis of silicon nanocrystals in silicon-rich SiO<inf>2</inf> by rapid CO<inf>2</inf> laser annealing

Lin, C.-J.C.-J.LinLin, G.-R.G.-R.LinChueh, Y.-L.Y.-L.ChuehGONG-RU LIN2020-06-112020-06-112005https://scholars.lib.ntu.edu.tw/handle/123456789/500217Synthesis of silicon nanocrystals in silicon-rich SiO<inf>2</inf> by rapid CO<inf>2</inf> laser annealingjournal article10.1149/1.21093272-s2.0-28044462658https://www.scopus.com/inward/record.uri?eid=2-s2.0-28044462658&doi=10.1149%2f1.2109327&partnerID=40&md5=f138e4ba3cc2dd0559f286ee81bdcac9