High-performance metal/SiO <inf>2</inf> /InSb capacitor fabricated by photoenhanced chemical vapor deposition

Sun, T.-P.T.-P.SunLee, S.-C.S.-C.LeeLiu, K.-C.K.-C.LiuPang, Y.-M.Y.-M.PangYang, S.-J.S.-J.YangSI-CHEN LEE2020-06-112020-06-111990https://scholars.lib.ntu.edu.tw/handle/123456789/498792High-performance metal/SiO <inf>2</inf> /InSb capacitor fabricated by photoenhanced chemical vapor depositionjournal article10.1063/1.3463342-s2.0-4243148111https://www.scopus.com/inward/record.uri?eid=2-s2.0-4243148111&doi=10.1063%2f1.346334&partnerID=40&md5=a4f7a4f9cbea0e164b796e5c169edaeb