JIA-YUSH YEN2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-80052420509&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/362675[SDGs]SDG7Planar motion stage control using PDFF controllerconference paper10.1109/WCICA.2011.59706142-s2.0-80052420509