工學院: 機械工程學研究所指導教授: 楊宏智黃士溥Huang, Shih-PuShih-PuHuang2017-03-132018-06-282017-03-132018-06-282016http://ntur.lib.ntu.edu.tw//handle/246246/278479拋光是使工件產生平滑鏡面之超精密製造技術，直接或間接代表一個國家機械製造業水準，對於提高光機電產品的性能品質壽命與研發高科技產品等層面皆具有十分重要的作用。目前拋光技術對於球面鏡面加工已趨近成熟，雖然可以達到很高的表面形狀精度，但球面透鏡仍存在像差(Aberration)問題。為了改善此類狀況，球面透鏡常以多片鏡面組合，但卻因此而弱化成像對比度。相較之下，非球面鏡片局部曲率半徑會隨著徑向位置而改變，無法以固定曲率模具進行研磨拋光，只能利用電腦輔助進行數控拋光，但若能使用非球面透鏡取代球面透鏡，不但符合對於光學成像品質的要求，同時能大幅縮小光學系統之體積。 本研究針對數控拋光進行探討，針對不同拋光參數對於透鏡表面形貌之影響進行探討，並抑制拋光過程中所產生之中頻空間形貌頻率(Mid-spatial frequency)，進而提高整體拋光後表面品質；由實驗結果可知，數控拋光之拋光頭進給速率並非影響表面品質之重要參數，同時如果將單方向進給路徑改為多方向進給路徑並進行重複拋光，不但可以降低透鏡表面之峰谷值(Peak-to-valley)與方均根值，中頻空間形貌頻率誤差也可以被有效抑制。希望藉由本研究所歸納出數據，有效提升拋光後表面品質與重複拋光將表面粗糙數值收斂之效率，進而降低拋光過程所需時間及人力成本，因應國內精密拋光技術與機台發展。Polishing is the grinding technique which can produce the ultra-precision smooth mirror surface. The technique, directly or indirectly, is on behalf of a national machinery manufacturing standards. Belonging back end of line (BEOL) processing optical element production, polishing plays an important role in improving performance not only the quality of life but development of high-tech products. The domestic polishing technique for spherical lens has reached certain level, but spherical lens still have some problem like chromatic aberration and distortion. To solve this kinds of problem, aspherical lens, which cannot be manufacture by traditional polishing technique and can only be fabricate by computer-aided polishing, are used to improve image quality and decrease optical system volume. Computer-aided polishing is studied in this paper. Focusing on surface texture, association between polishing parameters and surface quality are discussed by material removal experiments. For computer-aided polishing fabrication, surface feed rates of polishing bonnet are not the crucial factor of surface texture. And, mid-spatial frequency error can be effectively eliminated by replacing one-direction path by multiple-direction paths. Values of surface’s peak-to-valley and root-mean-square can also be reduced. The cost of polishing process can also be declined at the same time. Hope that this research can promote the development of high accuracy polishing technique and domestic polishing apparatus.5148885 bytesapplication/pdf論文公開時間: 2017/9/13論文使用權限: 同意有償授權(權利金給回饋本人)精密數控拋光中頻表面形狀頻率多方向進給路徑表面品質High Accuracy PolishingMid-spatial frequencyMultiple-direction pathsSurface qualitythesis10.6342/NTU201601197http://ntur.lib.ntu.edu.tw/bitstream/246246/278479/1/ntu-105-R03522736-1.pdf