Recent research and challenges in multiple patterning layout decomposition

Jiang, I.H.-R.I.H.-R.JiangChang, H.-Y.H.-Y.ChangHUI-RU JIANG2020-06-112020-06-112018https://scholars.lib.ntu.edu.tw/handle/123456789/497912[SDGs]SDG11Recent research and challenges in multiple patterning layout decompositionconference paper10.1109/ISVLSI.2018.000962-s2.0-85052112343https://www.scopus.com/inward/record.uri?eid=2-s2.0-85052112343&doi=10.1109%2fISVLSI.2018.00096&partnerID=40&md5=5809ee5f33a74b74bdf5a61ee9fc5ea7