Lai Y.-CWu P.-CChuang T.-H.TUNG-HAN CHUANG2022-03-222022-03-22202125891529https://www.scopus.com/inward/record.uri?eid=2-s2.0-85114770434&doi=10.1016%2fj.mtla.2021.101215&partnerID=40&md5=1cc88a8b5ce853da552f2ee48a7f6728https://scholars.lib.ntu.edu.tw/handle/123456789/598452In this study, different grain growth paths after aging at various temperatures for 1 h were observed in Ag nanotwinned thin films with and without substrate bias voltage, which led to large differences in thermal stability. As-deposited Ag nanotwinned thin films with and without substrate bias voltage were characterized by FIB, EBSD, and TEM, which revealed thinner equiaxial fine-grained regions, higher amounts of (111)-oriented grains and denser nanotwin stacking perpendicular to the growth direction of columnar grains in thin films with -150 V substrate bias voltage. Due to the better lattice arrangement and densification of the crystal structure due to substrate bias voltage, the microstructures remained almost unchanged, except for a little equiaxial grain growth, even after aging at 450 °C for 1 h. However, in the Ag nanotwinned thin film without substrate bias voltage, severe abnormal grain growth (AGG) occurred after aging at only 250 °C for 1 h. Better understanding of the differences in thermal stability in nanotwinned thin films is provided in this study, and the findings will be beneficial for experimental design for further applications. ? 2021Abnormal grain growthAg thin filmNanotwinsSubstrate biasThermal stabilityBias voltageCrystal structureFilm growthGrain growthThin filmsAg thin filmsFine grainedGrowth pathsNanotwinnedStackingsSubstrate bias voltagesThin-filmsThermodynamic stabilityjournal article10.1016/j.mtla.2021.1012152-s2.0-85114770434