Investigation of Semi-Polar GaN Grown on (0001) C-plane Nano-Sized Patterned-Sapphire Substrates

Su, Vin CentVin CentSuChen, Po HsunPo HsunChenHung, Zheng HungZheng HungHungYou, Yao HongYao HongYouChen, Yen PuYen PuChenHsu, Ta ChengTa ChengHsuLin, Yu YaoYu YaoLinLin, Ray MingRay MingLinCHIEH-HSIUNG KUAN2023-06-012023-06-012016-01-019781557528209https://scholars.lib.ntu.edu.tw/handle/123456789/631690This paper reported the growth of semi-polar GaN epi-layers on (0001) c-plane nano-sized patterned-sapphire substrates (c-NPSSs). In addition, the impact of c-NPSSs on the quality of semi-polar film had also been studied.Investigation of Semi-Polar GaN Grown on (0001) C-plane Nano-Sized Patterned-Sapphire Substratesconference paper2-s2.0-85136418416https://api.elsevier.com/content/abstract/scopus_id/85136418416