Simultaneous EUV flare variation minimization and CMP control by coupling-aware dummification

Chiang, H.-J.K.H.-J.K.ChiangLiu, C.-Y.C.-Y.LiuJiang, J.-H.R.J.-H.R.JiangYAO-WEN CHANGJIE-HONG JIANG2018-09-102018-09-102016http://www.scopus.com/inward/record.url?eid=2-s2.0-84963737094&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/396591[SDGs]SDG9Simultaneous EUV flare variation minimization and CMP control by coupling-aware dummificationjournal article10.1109/TCAD.2015.24884922-s2.0-84963737094WOS:000372995000007