Huang Sheng-ChihHung Shao-KangChen Mei-YungLin Chih-HsienFu Li-Chen2010-12-102018-07-062010-12-102018-07-062007http://ntur.lib.ntu.edu.tw//handle/246246/220743en-USDesign and Control of Novel Six-DOF Electromagnetic Precision Positioner Utilizing Hybrid Mechanismconference paper