Altama, Alfreda KrisnaAlfreda KrisnaAltamaHaji, Helmi SonHelmi SonHajiKong, Fan-HuaFan-HuaKongChang, Ting-HaoTing-HaoChangHubert, BryanBryanHubertFan, Tsung-YunTsung-YunFanYeh, Tsu-HaoTsu-HaoYehWang, Jun-TingJun-TingWangKaswan, KuldeepKuldeepKaswanNjoto, Hansen KurniawanHansen KurniawanNjotoYiu, PakmanPakmanYiuZONG-HONG LINLee, San-LiangSan-LiangLeeWang, Sea-FueSea-FueWangHwang, Bing JoeBing JoeHwangChang, SherySheryChangWang, Yun-CheYun-CheWangChu, Jinn P.Jinn P.Chu2026-04-242026-04-242025-11-0113698001https://www.scopus.com/pages/publications/105008184585?origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/737540Photolithography remains the dominant technique for fabricating photoresist templates in semiconductor nanodevice manufacturing, though each template typically produces only one nanostructure type. This paper provides a comprehensive review (2021–2025) of lithography and sputter deposition methods for wafer-scale fabrication of diverse highly ordered nanostructure arrays, focusing on three key architectures: metal mesh (MM), metallic nanotube arrays (MeNTA), and metallic pillar arrays (MPA). These structures exhibit exceptional surface area, structural versatility, and durability across applications. The MeNTA fabrication approach offers enhanced eco-friendliness through reduced chemical processing and low-temperature fabrication, coupled with geometrically tunable features (circular, triangular, and rhombic cross-sections). These advantages position MeNTAs as ideal platforms for advanced sensing technologies, including SERS-based biosensing of exosomes and analytes, glucose detection, H2 gas sensing, magnetic field sensing using Fe3O4-functionalized arrays. Furthermore, the structural flexibility of MM, MeNTA, and MPA architectures enables applications spanning: biosensing and nanohybrid devices, sustainable energy solutions (lithium-based batteries, triboelectric nanogenerators [TENG], supercapacitors), emerging fields (quantum computing, metasurfaces, flexible electronics). By evaluating current progress and future prospects, we highlight the transformative potential of these nanostructured materials in developing eco-friendly, energy-efficient technologies.falseBiosensingFar infrared emissionFlexible substrateMetallic meshesMetallic nanotube arrayMetallic pillar arrayMetasurfacesTriboelectric nanogeneratorsreview article10.1016/j.mssp.2025.1097692-s2.0-105008184585