Statistical analysis and design of semiconductor manufacturing systems

Graduate Inst. of Indutrial Eng., National Taiwan Univ.Chen, ArgonArgonChenGuo, P.S.P.S.GuoLin, PuffyPuffyLin2007-04-192018-06-292007-04-192018-06-292000-09http://ntur.lib.ntu.edu.tw//handle/246246/2007041908551535application/pdf402630 bytesapplication/pdfen-US[SDGs]SDG9Statistical analysis and design of semiconductor manufacturing systemsjournal article10.1109/ISSM.2000.993681http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908551535/1/00993681.pdf