Robust QFT control of a three-axis nano-positioning stage

Tsai M.-S.Luo Q.-R.2019-07-042019-07-0420081424416655; 9781424416653https://www.scopus.com/inward/record.uri?eid=2-s2.0-57849098924&doi=10.1109%2fISIE.2008.4677044&partnerID=40&md5=4a365b054b448a9d56fe6dbf3092b532https://scholars.lib.ntu.edu.tw/handle/123456789/412700Robust QFT control of a three-axis nano-positioning stageconference paper10.1109/ISIE.2008.46770442-s2.0-57849098924