Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems

Lin, Chiao-ChiChiao-ChiLinFang, WeileunWeileunFangLin, Hung-YiHung-YiLinHsueh, Chun-HwayChun-HwayHsuehLee, SanbohSanbohLee2012-10-242018-06-282012-10-242018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/243750en-USMeasurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systemsjournal article10.1557/jmr.2011.111http://ntur.lib.ntu.edu.tw/bitstream/246246/243750/-1/193.pdf