Improved RF Performance with Buried Power Rail and Contact over Active Gate in Nanosheet FETs

Hao-Chi ChiuVita Pi-Ho Hu2024-10-082024-10-082024-05-19https://scholars.lib.ntu.edu.tw/handle/123456789/721870Improved RF Performance with Buried Power Rail and Contact over Active Gate in Nanosheet FETsconference paper10.1109/iscas58744.2024.10558338