A Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structures

Y.-J. YangW.-C. KuoK.-C. FanYAO-JOE YANG2021-11-252021-11-252006https://scholars.lib.ntu.edu.tw/handle/123456789/587856A Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structuresjournal article