Microfabrication using silicon mold inserts and hot embossing

Inst. of Appl. Mech., National Taiwan Univ.Lin, LiweiLiweiLinChiu, Chun-JungChun-JungChiuBache, WalterWalterBacheHeckele, MathiasMathiasHeckele2007-04-192018-06-292007-04-192018-06-291996-10http://ntur.lib.ntu.edu.tw//handle/246246/2007041910031951application/pdf737168 bytesapplication/pdfen-USMicrofabrication using silicon mold inserts and hot embossingother10.1109/MHS.1996.563403http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910031951/1/00563403.pdf