2024-05-182024-05-1813282https://scholars.lib.ntu.edu.tw/handle/123456789/717225Design and fabrication of nano/micro-devicessensor arrayssmart and sustainable mechatronic systembiomedical chipsoptical communication devicesMEMS/NEMS dynamics measurement techniquesMEMS EDA微機電系統及設計與製作奈米技術智慧節能光機電系統可撓式感測陣列無線感測器網路平行運算