In-situ MBE and ALD deposited HfO2 on In0. 53Ga0. 47As

Lee, WCWCLeeLin, CACALinHuang, MLMLHuangKwo, JJKwoChang, YHYHChangChang, PPChangLin, TDTDLinMINGHWEI HONG2018-09-102018-09-102012http://scholars.lib.ntu.edu.tw/handle/123456789/371832In-situ MBE and ALD deposited HfO2 on In0. 53Ga0. 47Asconference paper