MEMS based current sensor using magnetic-to-mechanical conversion and reference components

Ertugrul BerkcanChristopher KapustaGlenn ClaydonAnis ZribiLaura MeyerWEI-CHENG TIAN2018-09-102018-09-102009-02http://scholars.lib.ntu.edu.tw/handle/123456789/352303MEMS based current sensor using magnetic-to-mechanical conversion and reference componentspatent