Huang H.-L.Liu C.-H.Jywe W.-Y.Wang M.-S.Wen-Yuh Jywe2022-05-242022-05-242009https://www.scopus.com/inward/record.uri?eid=2-s2.0-67549145021&doi=10.1243%2f09544054JEM1190&partnerID=40&md5=fffa3806ad20c2a735d08427ae89f6e5https://scholars.lib.ntu.edu.tw/handle/123456789/611952In this study, a high-resolution three-degrees-of-freedom (3-DOF) motion error measuring system based on interference is described. It can simultaneously measure the linear displacement and two angular errors of a single-axis linear moving platform. The displacement is measured using a polarization interference technique and the two angular errors are also measured based on the geometry optical theorem. The verification results show that the resolution is about 20nm. The 3-DOF measurement system detected displacements relative to a measurement mirror move with an accuracy of about ±8μm for a measuring range of ± 50mm, and detected the angular errors with a related accuracy of about ± 2 arc sec for a measuring range of ± 100 arc sec. ? IMechE 2009.Angular errorsHigh resolutionLinear displacementsMeasurement systemMeasuring systemsMotion errorsMoving platformOptical theoremQuadrant detectorSingle-axisThree degrees of freedomVerification resultsCavity resonatorsMeasurement theoryMechanicsPolarizationMeasurement errorsjournal article10.1243/09544054JEM11902-s2.0-67549145021