Double Laser Crystallization (DLC) of pre-patterned amorphous silicon film and amorphous silicon film with a patterned assisting SIO2 layer

Xu, L.L.XuChung, J.J.ChungGrigoropoulos, C.P.C.P.GrigoropoulosLI XU2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-21544468025&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/311458Double Laser Crystallization (DLC) of pre-patterned amorphous silicon film and amorphous silicon film with a patterned assisting SIO2 layerconference paper10.1115/ht-fed2004-56729