The systematic investigation of self-heating effect on CMOS Logic transistors from 20 nm to 5 nm technology nodes by experimental thermo-electric measurements and finite element modeling

M. H.LiaoC.-P. HsiehC.-C. Lee2019-03-112019-03-112017https://scholars.lib.ntu.edu.tw/handle/123456789/404571The systematic investigation of self-heating effect on CMOS Logic transistors from 20 nm to 5 nm technology nodes by experimental thermo-electric measurements and finite element modelingjournal article