Data mining and fault diagnosis based on wafer acceptance test data and in-line manufacturing data

Fan, C.-M.C.-M.FanGuo, R.-S.R.-S.GuoChen, A.A.ChenHsu, K.-C.K.-C.HsuARGON CHENRUEY-SHAN GUO2020-03-022020-03-022001https://scholars.lib.ntu.edu.tw/handle/123456789/467255Data mining and fault diagnosis based on wafer acceptance test data and in-line manufacturing datajournal article10.1109/ISSM.2001.9629412-s2.0-0035171373https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035171373&doi=10.1109%2fISSM.2001.962941&partnerID=40&md5=41c72e391c58c1eddc54cdcfbd4e095a