Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage

Wen S.-F.Yen J.-Y.Liu S.-T.Wang F.-C.Chen M.-S.Chen Y.-Y.Hung C.-W.JIA-YUSH YENFU-CHENG WANG2019-07-032019-07-0320179596518https://www.scopus.com/inward/record.uri?eid=2-s2.0-85019560451&doi=10.1177%2f0959651817701587&partnerID=40&md5=831857121440a792ea7d6702ff470cc8https://scholars.lib.ntu.edu.tw/handle/123456789/412557Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stageconference paper10.1177/09596518177015872-s2.0-85019560451