Self-aligned inversion n-channel In 0.2 Ga 0.8 As/GaAs MOSFET with TiN gate and Ga 2 O 3 (Gd 2 O 3) dielectric

Chen, Chih-PingChih-PingChenLin, Tsung-DaTsung-DaLinChang, Yao-ChungYao-ChungChangMINGHWEI HONGKwo, J RaynienJ RaynienKwo2018-09-102018-09-102007http://scholars.lib.ntu.edu.tw/handle/123456789/331377Self-aligned inversion n-channel In 0.2 Ga 0.8 As/GaAs MOSFET with TiN gate and Ga 2 O 3 (Gd 2 O 3) dielectricbook part