Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching process

Yu-Hsuan HsuYun-Cheng HsuChien-Chung LinYi-Hsin LinDong-Sing WuuHao-Chung KuoSeiji SamukawaRay-Hua Horng2024-08-092024-08-092024-06https://scholars.lib.ntu.edu.tw/handle/123456789/720163[SDGs]SDG7Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching processjournal article10.1016/j.mtadv.2024.100496