謝淑華臺灣大學：機械工程學研究所鄭暉達Cheng, Hui-TaHui-TaCheng2007-11-282018-06-282007-11-282018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/61376由於12吋晶圓的引進，非生產設備的自動化物料搬運系統將全面導入晶圓製造廠中。針對生產設備之效益評估，一般皆以投資報酬率為主要訴求，因此回收年限就成為其評估的重要指標。至於非生產設備之自動化物料搬運系統，則大都以搬運效率為評估的依據。 本研究擬從回收年限的角度，來探討與評估比較不同設計的自動化物料搬運系統，進而提供投資者一套評估的準則。本研究將先以Little’s Law的觀念，將非生產設備之系統效益區分為產能提升及線上在製品庫存降低兩種情形。再以限制理論為基礎提出新的成本概念，並經由此概念將系統效益變化加以資金化，最終再以裝設成本及資金化後之效益變化來估算其回收年限。透過本研究所提出之評估方法，期投資者能對於晶圓廠中自動化物料搬運系統於整體效益的提昇有更深一層的認識。Because of the advent of 12-inch semiconductor wafers, the automated material handling system (AMHS) becomes a necessary investment to the industry. The main evaluation methods for most of production equipments are normally based on the investment return. For those non-productivity equipment investments, the investment returns are difficult to estimate since they do not produce products. Therefore, the evaluations of the AMHS are mostly focused on the minimization of the total traveling distance. However, the shortest traveling distance does not guarantee the best efficiency. Of course, it does not lead to the best investment return. The main purpose of this study intends to evaluate an AMHS from the investment return viewpoint. This study includes two parts. In part I, by adopting the concept of the Little's law, the system efficiency due to the installation of an AMHS can be quantified. The resulting efficiency can either be from the increase of the throughput, or the decrease of the WIP inventory. The former makes extra sale profit, and the latter saves the WIP inventory cost. In part II, based on the theory of constraints (TOC), TOC product costing and profit estimation formulations are established. The investment return years can then be estimated by dividing the sale extra profit to the investment for the case of the throughput increase, or by dividing the saving inventory cost to the investment for the case of the WIP inventory decrease. For the purpose of demonstrating the proposed method, a specified simulation case is performed and the years of returns are estimated one by one for different market prospects at last.目 錄 致謝...............................................Ⅰ 中文摘要...........................................Ⅱ 英文摘要...........................................Ⅲ 目錄...............................................Ⅳ 圖目錄.............................................Ⅶ 表目錄.............................................Ⅷ 目 錄 第一章 緒論........................................1 1-1研究背景與動機...................................1 1-2研究目的.........................................4 1-3研究步驟.........................................4 第二章 文獻回顧....................................7 2-1自動化物料搬運系統效益分析之相關研究文獻回顧.....7 2-2廠房規劃佈置之相關研究文獻回顧...................9 2-3搬運車管理問題之相關研究文獻回顧.................11 第三章 研究基礎....................................14 3-1自動化物料搬運系統之簡介.........................14 3-2 Little’s law之簡介.............................16 3-3成本估算之理論基礎...............................17 3-3-1作業基礎成本制之簡介.........................18 3-3-1-1作業基礎成本制之相關研究.................18 3-3-2限制理論之簡介...............................19 3-3-2-1限制理論之相關研究.......................22 第四章 以模擬方式建立AMHS之TOC回收年限評估方法學...25 4-1定義系統獲利.....................................28 4-2建立TOC回收年限評估方法學........................30 4-2-1建立TOC製造成本計算式........................31 4-2-2產能獲利運算法...............................39 4-2-3TOC庫存成本運算法............................40 4-3方法學之建立與流程總結...........................43 第五章 實例探討—以模擬方式建立AMHS之TOC回收年限評估方法學..................................................52 5-1廠房與AMHS的佈置與規劃...........................52 5-2模擬實驗平台構建.................................57 5-2-1製程及設備介紹...............................57 5-2-2系統假設.....................................60 5-2-3實驗平台建構.................................62 5-2-4模型邏輯及程序...............................68 5-3實例探討............... .........................72 5-3-1產能相近之TOC囤積成本評比....................74 5-3-2產能相異之產能獲利評比.......................85 5-3-3討論.........................................87 5-4小結.............................................90 第六章 總結........................................91 6-1結論.............................................91 6-2未來研究方向.....................................92 參考文獻............................................93 附錄................................................98 附表1產品A晶圓加工製程表........................... 98 附表2產品B晶圓加工製程表...........................100 附表3各機台名稱與種類資料表........................102 圖 目 錄 圖2-1兩種常見之晶圓廠規劃佈置示意圖.................10 圖2-2加工區和機台間寬度之示意圖.....................10 圖4-1模擬實驗流程圖.................................27 圖4-2某廠IC製造流程圖...............................41 圖4-3研究流程.......................................43 圖4-4各製程影響示...................................48 圖5-1脊柱式廠房佈置圖...............................54 圖5-2 Overhead Hoist Transporter....................55 圖5-3 Rail Guided Vehicle...........................56 圖5-4系統流程圖.....................................63 圖5-5模擬系統示意圖.................................71 圖5-6倉儲費用與投料率之關係圖.......................84 圖5-7在製品數量與投料率之關係圖.....................84 表 目 錄 表4-1某晶圓製造廠之設備規劃.........................36 表4-2晶圓批經過不同機台加工之TOC製造成本比較表......38 表4-3不同序號之晶圓批其負擔之製造成本...............42 表4-4 OHT及RGV之參數比較............................44 表4-5 A、B系統之各項相關數據表......................48 表4-6某晶圓廠利用不同搬運系統之相關數據表...........49 表5-1各加工區內所包含之機台群編號...................58 表5-2各機台設備資料表...............................59 表5-3物件表.........................................64 表5-4控制物件表.....................................65 表5-5系統階層關係表.................................66 表5-6各類別機台數量.................................68 表5-7晶圓加工區（bay）之From-To表...................72 表5-8 A、B產品所需經過各機台加工次數之比較表........73 表5-9模擬360天，重複10次後各機台之瓶頸機率平均值分佈75 表5-10機台相關數據..................................77 表5-11 TOC製造成本..................................79 表5-12 A產品之TOC製造成本累計表.....................80 表5-13 B產品之TOC製造成本累計表.....................81 表5-14產能相近下裝設不同AMHS之倉儲費用績效表現......82 表5-15產能相異下裝設不同AMHS之產能獲利績效表現......86 表5-16倉儲費用與回收年限關係表......................88 表5-17產能獲利與回收年限關係表......................892525217 bytesapplication/pdfen-US自動化物料搬運系統回收年限Little’s Law限制理論an automated material handling systeminvestment returntheory of constraintsthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/61376/1/ntu-94-R92522719-1.pdf