Deep Sub-micron GaN Photonic Crystal Fabricated by Self-assembly Lithography with Photo-enhanced Wet Etching

H.-M. WuP.-C.HuangW.-H. TuC.-M. LaiL.-H. PengLUNG-HAN PENG2018-09-102018-09-102006-10http://scholars.lib.ntu.edu.tw/handle/123456789/325669Kyoto, JapanDeep Sub-micron GaN Photonic Crystal Fabricated by Self-assembly Lithography with Photo-enhanced Wet Etchingconference paper