Synchrotron radiation X-ray absorption and optical studies of cubic SiC films grown on Si by chemical vapor deposition

Tu, Y.-L.Y.-L.TuHuang, Y.-H.Y.-H.HuangKong, L.L.KongLee, K.-Y.K.-Y.LeeJang, L.-Y.L.-Y.JangTin, C.-C.C.-C.TinLiu, C.-W.C.-W.LiuKUNG-YEN LEECHEE-WEE LIU2020-01-172020-01-172011https://scholars.lib.ntu.edu.tw/handle/123456789/451527Synchrotron radiation X-ray absorption and optical studies of cubic SiC films grown on Si by chemical vapor depositionconference paper10.4028/www.scientific.net/AMR.306-307.1672-s2.0-80053086066https://www.scopus.com/inward/record.uri?eid=2-s2.0-80053086066&doi=10.4028%2fwww.scientific.net%2fAMR.306-307.167&partnerID=40&md5=ca1a0add7cfcaabd751a392e21a07240