A low actuation voltage electrostatic actuator for RF MEMS switch applications

Chu, C.-H.C.-H.ChuShih, W.-P.W.-P.ShihChung, S.-Y.S.-Y.ChungTsai, H.-C.H.-C.TsaiShing, T.-K.T.-K.ShingChang, P.-Z.P.-Z.ChangShih, Wen-PinWen-PinShihPEI-ZEN CHANG2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-34547657513&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/330604A low actuation voltage electrostatic actuator for RF MEMS switch applicationsjournal article10.1088/0960-1317/17/8/0312-s2.0-34547657513WOS:000248776800030