Chih-Yen ChenC. C. YangCHIH-CHUNG YANG2019-10-312019-10-312016https://scholars.lib.ntu.edu.tw/handle/123456789/429692Fabrication Method of Nitride Forming on Silicon Substratepatent美國專利 No. 9,281,184 B2 (03/08/2016-09/15/2033)