Young, H.T.H.T.YoungLin, C.C.C.C.LinLiao, H.T.H.T.Liao2011-02-112018-06-282011-02-112018-06-282006-07http://ntur.lib.ntu.edu.tw//handle/246246/222989en-USPrecision Wafer Thinning and Its Surface Conditioning Techniquejournal article