2014-08-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/697048摘要：本計畫擬發展微型複眼鏡頭陣列系統的減震設計與控制。複眼鏡頭陣列可以達到高解析度、高取樣頻率的功能，然此同時，系統振動對成像品質的影響亦將增加。故本計畫的目標，是應用先進伺服控制技術發展精密移動平台，以達到奈米精度定位，一則應用於複眼陣列平台，以改善複眼光學平台的振動，提昇其成像品質；二則支援子計畫二之雙光子聚合微製造平台，以提升其精度，製作符合總計畫需要的鏡頭。首先，因系統體積限制及精密度要求，本計畫將使用壓電材料發展專用之硬體防震技術，壓電材料具有反應快、高精度、出力大等優點，然而其複雜的非線性動態特性卻可能影響系統性能，因此我們透過強韌控制技術，將遲滯效應等非線性因素視為系統不確定性，並設計適當的H∞ 強韌控制器，以提昇系統穩定及性能。其次，我們整合小行程奈米定位平台及大行程微米平台，完成大行程、奈米精密定位控制，以支援子計畫二的雙光子聚合微製造平台控制需求。最後，考慮複眼光學系統可能有多軸旋轉及線性定位控制需求，我們將進一步發展互補三維平台，以完成三維空間全自由度控制。我們會將控制器安裝於雙光子聚合微製造平台系統及微型複眼鏡頭陣列平台，以實驗驗證其效果。<br> Abstract: This project focuses on the vibration control of the Micro-lens arrays (MLAs) that can imitate the functions of ommateum. The proposed MLAs can achieve high resolution and sampling rates, using the present digital photographing techniques. However, as the resolution and sampling rates increase, the impacts of vibrations on the imaging properties also become significant. Therefore, this project proposes a nano-positioning piezoelectric transducer (PZT) stage to improve the imaging properties of the MLAs, and then integrates the PZT stage with a stepper stage to achieve the requirement of long-stroke nano-positioning for the two-photon polymerization (TPP) micro-manufacturing system of subproject 2. First, we apply PZT to achieve precision positioning for its advantageous properties, such as high resolution, high accuracy, and large driving force. But the non-linear characteristics of piezoelectric materials, such as hysteresis, might degrade the system performance. Hence, we can identify PZT actuators as linear models and regard the non-linear effects as system uncertainties and disturbances. We then apply loop-shaping techniques to design H∞ robust controllers for the PZT stage to guarantee system stability and to improve system performance. Second, we integrate the nano-stage with a micro-stage to achieve long-range, nano-precision control. We then apply the combined stage to the TPP micro-manufacturing system for manufacturing lens for the MLAs system. Third, we consider the rotational displacements of the lens array and design a complementary three degree-of-freedom (DOF) stage to accomplish the full DOF control for the MLAs system. Lastly, the designed stages will be integrated with the MLAs systems for experimental verification.微型複眼鏡頭陣列減震控制精密移動平台定位強韌控制Micro-lens arraysvibration controlprecision positioningrobust control微型複眼陣列鏡頭製作及其成像之應用-子計畫四：微型複眼陣列系統之減震設計及控制