Electrical Characterization of the Insulating Property of Ta2o5 in Al-Ta2o5-Sio2-Si Capacitors by a Low-Frequency C/V Technique

Hwu, JgJgHwuLin, StStLinSHIANG-TAI LIN2020-01-062020-01-0619900956-3768https://scholars.lib.ntu.edu.tw/handle/123456789/445783Electrical Characterization of the Insulating Property of Ta2o5 in Al-Ta2o5-Sio2-Si Capacitors by a Low-Frequency C/V Techniquejournal article10.1049/ip-g-2.1990.0060WOS:A1990ED17100009