The Study on the Fluid Dynamics and Electromagnetics of capacitive Micro-Accelerometers ( I ), NSC-report, NSC 86-2221-E002-055

Chang, P.Z.P.Z.ChangWang, A.-B.A.-B.WangAN-BANG WANG2020-05-142020-05-141997https://scholars.lib.ntu.edu.tw/handle/123456789/492806The Study on the Fluid Dynamics and Electromagnetics of capacitive Micro-Accelerometers ( I ), NSC-report, NSC 86-2221-E002-055report