Optical properties and photoconductivity of amorphous silicon carbon nitride thin film and its application for UV detection

Chen, C.W.C.W.ChenHuang, C.C.C.C.HuangLin, Y.Y.Y.Y.LinChen, L.C.L.C.ChenChen, K.H.K.H.ChenWEI-FANG SU2020-05-122020-05-122005https://www.scopus.com/inward/record.uri?eid=2-s2.0-18444391842&doi=10.1016%2fj.diamond.2004.11.027&partnerID=40&md5=c80446b51fc4e19c3e431e37a068250aOptical properties and photoconductivity of amorphous silicon carbon nitride thin film and its application for UV detectionconference paper10.1016/j.diamond.2004.11.0272-s2.0-18444391842