Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write

Fu-Min WangKuen-Yu TsaiJIA-HAN LIAlek C. ChenYen-Min LeeYu-Tian ShenHsin-Hung ChengChieh-Hsiang Kuan2022-01-032022-01-032010https://scholars.lib.ntu.edu.tw/handle/123456789/590901Fabrication of metrology test structures with programmed line edge roughness using electron beam direct writeposter