Chemical Characterization of Electronic Microstructures with Sub-100 nm Lateral Resolution

王玉麟Levi-Setti, R.R.Levi-SettiChabala, J. M.J. M.ChabalaHallegot, P.P.HallegotWang, Yuh-LinYuh-LinWang2009-01-232018-06-282009-01-232018-06-281988http://ntur.lib.ntu.edu.tw//handle/246246/110803en-USChemical Characterization of Electronic Microstructures with Sub-100 nm Lateral Resolutionconference paper