Large-area full-field thickness measurement of glass plates by an optical interferometric system

Sung, Po-ChiPo-ChiSungWang, Wei-ChungWei-ChungWangHwang, Chi-HungChi-HungHwangWEICHUNG WANG2019-10-282019-10-2820140030-4018https://scholars.lib.ntu.edu.tw/handle/123456789/428598Large-area full-field thickness measurement of glass plates by an optical interferometric systemjournal article10.1016/j.optcom.2014.07.086WOS:000343381200041