Growth of high-quality SiGe films with a buffer layer containing Ge quantum dots

Lee, S.W.S.W.LeeChen, P.S.P.S.ChenChien, T.Y.T.Y.ChienChen, L.J.L.J.ChenChia, C.T.C.T.ChiaCHEE-WEE LIU2020-06-162020-06-162006https://scholars.lib.ntu.edu.tw/handle/123456789/502092Growth of high-quality SiGe films with a buffer layer containing Ge quantum dotsjournal article10.1016/j.tsf.2005.08.3952-s2.0-33646105865https://www.scopus.com/inward/record.uri?eid=2-s2.0-33646105865&doi=10.1016%2fj.tsf.2005.08.395&partnerID=40&md5=283e22b8ea265769244d4748324128c3