Phase and thickness dependence of thermal diffusivity in a-SiCxNy and a-BCxNy

Chattopadhyay, S.S.ChattopadhyayChen, L. C.L. C.ChenChien, S. C.S. C.ChienLin, S. T.S. T.LinWu, C. T.C. T.WuChen, K. H.K. H.ChenSHIANG-TAI LIN2020-01-062020-01-0620020040-6090https://scholars.lib.ntu.edu.tw/handle/123456789/445761Phase and thickness dependence of thermal diffusivity in a-SiCxNy and a-BCxNyjournal article10.1016/S0040-6090(02)00747-2WOS:000179922500035