Laser annealing and local heating effects during raman measurement of hydrogenated amorphous silicon films

CHIH-WEN LIUYang, Y.-J.Y.-J.YangYI-HSUAN YANGPeng, C.-Y.C.-Y.PengCHIH-WEN LIU2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-84863148857&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356945Laser annealing and local heating effects during raman measurement of hydrogenated amorphous silicon filmsconference paper10.1149/1.3360764