Lin, C.-W.C.-W.LinLin, S.-Y.S.-Y.LinSI-CHEN LEEChia, C.-T.C.-T.Chia2020-06-112020-06-11200200218979https://scholars.lib.ntu.edu.tw/handle/123456789/498759https://www.scopus.com/inward/record.uri?eid=2-s2.0-33845384931&doi=10.1063%2f1.1433185&partnerID=40&md5=7166d77011194e368a792cb8c6d309afSilicon-germanium alloy nanoparticles with spherical shape have been prepared by the thermal evaporation method. The shape and structure of these dots have been studied. Transmission electron microscopy images show that the SiGe nanoparticles grown at 100 Torr may be composed of two half-moon shaped sections. Furthermore from the transmission electron diffraction patterns and Raman spectra, a change of structure from amorphous to crystalline at the 0.4 Torr growth pressure was observed. It is also found that if the growth pressure increases, the Ge composition of SiGe dots will decrease. A model is proposed to explain this phenomenon. © 2002 American Institute of Physics.Growth pressure; SiGe dots; Silicon-germanium alloys; Spherical shape; Structural and optical properties; Thermal evaporation method; Transmission electron diffraction; Transmission electron microscopy images; Germanium; Nanoparticles; Optical properties; Silicon alloys; Thermal evaporation; Transmission electron microscopy; Germanium alloysjournal article10.1063/1.14331852-s2.0-33845384931