Sachs, EmanuelEmanuelSachsGuo, Ruey-ShanRuey-ShanGuoHa, SungdoSungdoHaHu, Albert K.Albert K.Hu2019-05-132019-05-131990https://www.scopus.com/inward/record.uri?eid=2-s2.0-0025626878&partnerID=40&md5=60da11dd5176fe26ad77b86baedc3b30https://scholars.lib.ntu.edu.tw/handle/123456789/407851Process control system for VLSI fabricationconference paper2-s2.0-0025626878