Localized CO2 laser annealing induced dehydrogenation/ablation and optical refinement of silicon-rich silicon dioxide film with embedded Si nanocrystals

Lin, Gong-RuGong-RuLinLin, Chun-JungChun-JungLinChou, Li-JenLi-JenChouGONG-RU LIN2020-06-112020-06-1120061533-4880https://scholars.lib.ntu.edu.tw/handle/123456789/500113Localized CO2 laser annealing induced dehydrogenation/ablation and optical refinement of silicon-rich silicon dioxide film with embedded Si nanocrystalsjournal article10.1166/jnn.2006.374WOS:000242601100007