An Investigation of Unbalanced-Magnetron Sputtered TiAlN Films on SKH51 High-Speed Steel

Wu, S.K.S.K.WuLin, H.C.H.C.LinLiu, P.L.P.L.LiuWuSK2008-11-182018-06-282008-11-182018-06-282000http://ntur.lib.ntu.edu.tw//handle/246246/86700application/pdf814567 bytesapplication/pdfen-USAn Investigation of Unbalanced-Magnetron Sputtered TiAlN Films on SKH51 High-Speed Steeljournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86700/1/75.pdf